The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Nov. 07, 2008
Kun Xu, Fremont, CA (US);
Feng Q Liu, San Jose, CA (US);
Yuchun Wang, Santa Clara, CA (US);
Abraham Ravid, Cupertino, CA (US);
Wen-chiang Tu, Mountain View, CA (US);
Kun Xu, Fremont, CA (US);
Feng Q Liu, San Jose, CA (US);
Yuchun Wang, Santa Clara, CA (US);
Abraham Ravid, Cupertino, CA (US);
Wen-Chiang Tu, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods of determining thickness and phase of a GST layer on a semiconductor substrate are described using intensity spectra within the infra-red range. In particular, techniques for using certain transmission at certain frequencies are disclosed for faster thickness and phase determination in an in-line or standalone metrology/monitoring system for CMP processes.