The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2014
Filed:
Jul. 01, 2011
Chia-chi Tsao, Zhubei, TW;
Syun-jie Jhan, Hsinchu, TW;
Yi-cheng Shih, Zhubei, TW;
Chwen Yu, Taipei, TW;
Chia-Chi Tsao, Zhubei, TW;
Syun-Jie Jhan, Hsinchu, TW;
Yi-Cheng Shih, Zhubei, TW;
Chwen Yu, Taipei, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
System and method for EMI shielding for a CD-SEM are described. One embodiment is a scanning electron microscope ('SEM') comprising an electron gun for producing an electron beam directed toward a sample; a secondary electron ('SE') detector for detecting secondary electrons reflected from the sample in response to the electron beam; and a dual-layer shield disposed around and enclosing the SE detector. The shield comprises a magnetic shielding lamina layer and a metallic foil layer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile