The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2014

Filed:

Mar. 30, 2012
Applicants:

Gunter Möhler, Jena, DE;

Dietmar Schmidt, Bibra, DE;

Oliver Holub, Jena, DE;

Inventors:

Gunter Möhler, Jena, DE;

Dietmar Schmidt, Bibra, DE;

Oliver Holub, Jena, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Method and apparatus for generating an at least two-dimensional image of at least part of a sample. The method involves scanning the sample. Acquiring at least one light signal by an optoelectronic detector for different areas of the sample. Converting the light signal into an electrical signal. Distributing the electrical signal onto several parallel evaluation channels whose signal evaluations differ from each other so that their dynamic ranges are different. Generating a result signal in each evaluation channel. Selecting at least one of the result signals as a function of one of the result signals in order to generate the image for the sample range concerned. It is also possible to generate one intermediate result signal for each channel, typically from the respective actual result signal and one or more other sources. Thus the signal selection depending on both the result signals and the intermediate result signals are possible.


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