The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2014
Filed:
Sep. 30, 2009
Munirathna Padmanaban, Bridgewater, NJ (US);
Srinivasan Chakrapani, Bridgewater, NJ (US);
Francis M. Houlihan, Millington, NJ (US);
Shinji Miyazaki, Fukuroi, JP;
Edward NG, Belle Mead, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
Munirathna Padmanaban, Bridgewater, NJ (US);
Srinivasan Chakrapani, Bridgewater, NJ (US);
Francis M. Houlihan, Millington, NJ (US);
Shinji Miyazaki, Fukuroi, JP;
Edward Ng, Belle Mead, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NY (US);
Abstract
The invention relates to a photoimageable antireflective coating composition capable of forming a pattern by development in an aqueous alkaline solution, comprising, (i) a polymer A soluble in a coating solvent and comprises a chromophore, a crosslinking moiety, and optionally a cleavable group which under acid or thermal conditions produces a functionality which aids in the solubility of the polymer in an aqueous alkaline solution and; (ii) at least one photoacid generator; (iii) a crosslinking agent; (iv) optionally, a thermal acid generator; (v) a polymer B which is soluble in an aqueous alkaline solution prior to development, where polymer B is non-miscible with polymer A and soluble in the coating solvent, and; (vi) a coating solvent composition, and (vii) optionally, a quencher. The invention also relates to a process for imaging the antireflective coating.