The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2014
Filed:
Nov. 02, 2006
Marcus Adrianus Van DE Kerkhof, Helmond, NL;
Haico Victor Kok, Eindhoven, NL;
Borgert Kruizinga, Zoetermeer, NL;
Timotheus Franciscus Sengers, s-Hertogenbosch, NL;
Bearrach Moest, Eindhoven, NL;
Marc Antonius Maria Haast, Eindhoven, NL;
Peter Werner Weissbrodt, Weimar, DE;
Manfred Helmut Gustav Wilhelm Johannes Schrenk, Kahla, DE;
Torsten Harzendorf, Jena, DE;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Haico Victor Kok, Eindhoven, NL;
Borgert Kruizinga, Zoetermeer, NL;
Timotheus Franciscus Sengers, s-Hertogenbosch, NL;
Bearrach Moest, Eindhoven, NL;
Marc Antonius Maria Haast, Eindhoven, NL;
Peter Werner Weissbrodt, Weimar, DE;
Manfred Helmut Gustav Wilhelm Johannes Schrenk, Kahla, DE;
Torsten Harzendorf, Jena, DE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A sensor for use at substrate level in a high numerical aperture lithographic apparatus, the sensor having a transparent plate that covers a sensing element and includes elements that improve coupling of radiation into the sensing element. The improved coupling elements include a flowing liquid medium disposed between the transparent plate and the sensing element.