The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Apr. 06, 2011
Jianming Zhou, Boise, ID (US);
Scott Light, Boise, ID (US);
Dan Millward, Boise, ID (US);
Yuan He, Boise, ID (US);
Kaveri Jain, Boise, ID (US);
Lijing Gou, Boise, ID (US);
Zishu Zhang, Boise, ID (US);
Anton Devilliers, Boise, ID (US);
Michael Hyatt, Boise, ID (US);
Jianming Zhou, Boise, ID (US);
Scott Light, Boise, ID (US);
Dan Millward, Boise, ID (US);
Yuan He, Boise, ID (US);
Kaveri Jain, Boise, ID (US);
Lijing Gou, Boise, ID (US);
Zishu Zhang, Boise, ID (US);
Anton DeVilliers, Boise, ID (US);
Michael Hyatt, Boise, ID (US);
Nanya Technology Corp., Kueishan, Tao-Yuan Hsien, TW;
Abstract
A method for reducing the effects of lens heating of a lens in an imaging process includes determining heat load locations on the lens according to an illumination source and a reticle design, obtaining a lens response characterization according to the heat load locations, and utilizing the heat load locations and the lens response characterization to generate a lens heating sensitivity map.