The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Jul. 02, 2010
Shin-hye Kim, Suwon-si, KR;
Kyung-mun Byun, Seoul, KR;
Hong-rae Kim, Seoul, KR;
Gil-heyun Choi, Seoul, KR;
Eun-kee Hong, Seongnam-si, KR;
Shin-hye Kim, Suwon-si, KR;
Kyung-mun Byun, Seoul, KR;
Hong-rae Kim, Seoul, KR;
Gil-heyun Choi, Seoul, KR;
Eun-kee Hong, Seongnam-si, KR;
Abstract
A semiconductor device may include a semiconductor substrate and a plurality of three-dimensional capacitors on the semiconductor substrate. Each of the plurality of three-dimensional capacitors may include a first three-dimensional electrode, a capacitor dielectric layer, and a second three-dimensional electrode with the first three-dimensional electrode between the capacitor dielectric layer and the semiconductor substrate and with the capacitor dielectric layer between the first and second three-dimensional electrodes. A plurality of capacitor support pads may be provided with each capacitor support pad being arranged between adjacent first three-dimensional electrodes of adjacent three-dimensional capacitors with portions of the capacitor dielectric layers between the capacitor support pads and the semiconductor substrate. Related methods and apparatuses are also discussed.