The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Aug. 23, 2011
Tomohiro Okumura, Osaka, JP;
Ichiro Nakayama, Osaka, JP;
Hiroshi Kawaura, Kanagawa, JP;
Tetsuya Yukimoto, Chiba, JP;
Tomohiro Okumura, Osaka, JP;
Ichiro Nakayama, Osaka, JP;
Hiroshi Kawaura, Kanagawa, JP;
Tetsuya Yukimoto, Chiba, JP;
Panasonic Corporation, Osaka, JP;
Abstract
In a plasma torch unit, copper rods forming a coil as a whole are disposed inside copper rod inserting holes formed in a quartz block so that the quartz block is cooled by water flowing inside the copper rod inserting holes and cooling water pipes. A plasma ejection port is formed on the lowermost portion of the torch unit. While a gas is being supplied into a space inside an elongated chamber, high-frequency power is supplied to the copper rods to generate plasma in the space inside the elongated chamber so that the plasma is applied to a substrate.