The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Jun. 06, 2011
Takanori Kudo, Bedminster, NJ (US);
Alberto Dioses, Doylestown, PA (US);
Edward NG, Belle Mead, NJ (US);
Srinivasan Chakrapani, Bridgewater, NJ (US);
Munirathna Padmanaban, Bridgewater, NJ (US);
Takanori Kudo, Bedminster, NJ (US);
Alberto Dioses, Doylestown, PA (US);
Edward Ng, Belle Mead, NJ (US);
Srinivasan Chakrapani, Bridgewater, NJ (US);
Munirathna Padmanaban, Bridgewater, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
The present invention relates to an antireflective coating composition comprising a crosslinking agent, a polymer comprising at least one chromophore group and at least one hydroxyl and/or a carboxyl group, and an additive, further where the additive has structure 1 and comprises at least one arylene-hydroxyl moiety, where Y is selected from an carboxylate anion or sulfonate anion, R, R, and Rare independently selected from unsubstituted C-Calkyl, substituted C-Calkyl, aryl and arylene-hydroxyl; X, X, and Xare independently selected from direct valence bond and C-Calkylene group, and, n=1, 2 or 3. The invention further relates to a process for using the composition.