The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Jul. 16, 2010
Eric Brian Catey, Danbury, CT (US);
Nora-jean Harned, Redding, CT (US);
Yevgeniy Konstantinovich Shmarev, Lagrangeville, NY (US);
Robert Albert Tharaldsen, Sherman, CT (US);
Richard David Jacobs, Brookfield, CT (US);
Eric Brian Catey, Danbury, CT (US);
Nora-Jean Harned, Redding, CT (US);
Yevgeniy Konstantinovich Shmarev, Lagrangeville, NY (US);
Robert Albert Tharaldsen, Sherman, CT (US);
Richard David Jacobs, Brookfield, CT (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
Disclosed are systems and methods for time differential reticle inspection. Contamination is detected by, for example, determining a difference between a first signature of at least a portion of a reticle and a second signature, produced subsequent to the first signature, of the portion of the reticle.