The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2013
Filed:
Oct. 03, 2011
Michal Danek, Cupertino, CA (US);
Juwen Gao, San Jose, CA (US);
Ronald A. Powell, Portola Valley, CA (US);
Aaron R. Fellis, Sunnyvale, CA (US);
Michal Danek, Cupertino, CA (US);
Juwen Gao, San Jose, CA (US);
Ronald A. Powell, Portola Valley, CA (US);
Aaron R. Fellis, Sunnyvale, CA (US);
Novellus Systems, Inc., Fremont, CA (US);
Abstract
Certain embodiments pertain to local interconnects formed by subtractive patterning of blanket layer of tungsten or other conductive material. The grain sizes of tungsten or other deposited metal can be grown to relatively large dimensions, which results in increased electrical conductivity due to, e.g., reduced electron scattering at grain boundaries as electrons travel from one grain to the next during conduction.