The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2013
Filed:
Feb. 11, 2011
Applicants:
Richard Anthony Dipietro, Campbell, CA (US);
Geraud Jean-michel Dubois, Los Gatos, CA (US);
Robert Dennis Miller, San Jose, CA (US);
Ratnam Sooriyakumaran, San Jose, CA (US);
Inventors:
Richard Anthony Dipietro, Campbell, CA (US);
Geraud Jean-Michel Dubois, Los Gatos, CA (US);
Robert Dennis Miller, San Jose, CA (US);
Ratnam Sooriyakumaran, San Jose, CA (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/038 (2006.01); G03F 7/075 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to compositions comprising poly-oxycarbosilane and methods for using the compositions in step and flash imprint lithography. The imprinting compositions comprise a poly-oxycarbosilane polymer, a silanol, a reaction initiator and optionally a pore generator.