The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2013
Filed:
Oct. 15, 2010
Kam S. Law, San Jose, CA (US);
Masato Toshima, Sunnyvale, CA (US);
Wendell Thomas Blonigan, Pleasanton, CA (US);
Linh Can, San Jose, CA (US);
Robin K. F. Law, Hong Kong, CN;
Kam S. Law, San Jose, CA (US);
Masato Toshima, Sunnyvale, CA (US);
Wendell Thomas Blonigan, Pleasanton, CA (US);
Linh Can, San Jose, CA (US);
Robin K. F. Law, Hong Kong, CN;
Orbotech LT Solar, LLC., San Jose, CA (US);
Abstract
A showerhead for a plasma process apparatus for processing substrates, comprising a showerhead body comprising a top plate and a bottom plate defining a cavity in between; a gas inlet formed in the top plate; a perforated plate positioned between the top plate and the bottom plate and dissecting the cavity into an upper gas compartment and a lower gas compartment; and, wherein the bottom plate comprises a plurality of elongated diffusion slots on its lower surface and a plurality of diffusion holes on its upper surface, each of the diffusion holes making fluid connection from the lower gas compartment to more than one of the diffusion slots.