The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2013
Filed:
Oct. 21, 2008
Young Ung an, Yongin-si, KR;
Ki Taek Jung, Seoul, KR;
Jong Yeoul Ji, Suwon-si, KR;
Sang Leoul Kim, Osan-si, KR;
Young Ung An, Yongin-si, KR;
Ki Taek Jung, Seoul, KR;
Jong Yeoul Ji, Suwon-si, KR;
Sang Leoul Kim, Osan-si, KR;
ADP Engineering Co., Ltd., Seongnam-Si, Gyeonggi-Do, KR;
Abstract
An organic material deposition system and method are provided. The organic material deposition apparatus may include a chamber having a processing space formed therein, a source supply device that generates an organic source and injects and diffuses the organic source into the processing space through a shower head provided in the processing space. The substrate is supported by a stage device that moves the substrate upward and downward within the processing space to adjust a distance between the substrate and the shower head. A pumping port provided at an upper positioned at an upper portion of the processing space provides a vacuum exhaust path that directs flow through the processing space toward the stage device. This allows an organic thin film with a uniform thickness to be deposited using an apparatus with a relatively simple configuration.