The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2013
Filed:
Jul. 31, 2012
Buz Darabnia, Gilbert, AZ (US);
Andy Yednak, Phoenix, AZ (US);
Mike Halpin, Scottsdale, AZ (US);
Loren Jacobs, Chandler, AZ (US);
Ravinder Aggarwal, Gilbert, AZ (US);
Buz Darabnia, Gilbert, AZ (US);
Andy Yednak, Phoenix, AZ (US);
Mike Halpin, Scottsdale, AZ (US);
Loren Jacobs, Chandler, AZ (US);
Ravinder Aggarwal, Gilbert, AZ (US);
ASM America, Inc., Phoenix, AZ (US);
Abstract
A thermocouple for use in a semiconductor processing reaction is described. The thermocouple includes a sheath having a measuring tip and an opening at the opposing end. A support member that receives a portion of a first wire and a second wire is received within the sheath. The first and second wires form a junction that contacts the inner surface of the sheath at the measuring tip. A spacing member is secured at the opening of the sheath and receives the support member. The spacing member allows the support member, first wire, and second wire to freely thermally expand relative to each other without introducing compression or tension stresses therein.