The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Dec. 12, 2011
Yoav Berlatzky, Kfar Uriva, IL;
Ido Kofler, Givataaim, IL;
Doron Meshulach, Ramat-Gan, IL;
Kobi Barkan, Holon, IL;
Yoav Berlatzky, Kfar Uriva, IL;
Ido Kofler, Givataaim, IL;
Doron Meshulach, Ramat-Gan, IL;
Kobi Barkan, Holon, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
An optical inspection system for inspecting a patterned sample located in an inspection plane includes an illumination unit defining an illumination path, and a light collection unit defining a collection path, each path having a certain angular orientation with respect to the inspection plane. The illumination unit comprises an illumination mask located in a first spectral plane with respect to the inspection plane and the light collection unit comprises a collection mask located in a second spectral plane with respect to the inspection plane being conjugate to the first spectral plane. Arrangements of features of the first and second patterns are selected in accordance with a diffraction response from said patterned sample along a collection channel defined by the angular orientation of the illumination and collection paths.