The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Jan. 30, 2012
Applicants:
Dongkyun Park, Suwon-si, KR;
Mansug Kang, Suwon-si, KR;
Inventors:
Dongkyun Park, Suwon-si, KR;
Mansug Kang, Suwon-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/92 (2006.01);
U.S. Cl.
CPC ...
Abstract
A capacitor of semiconductor device is provided including a lower electrode on a semiconductor substrate; a dielectric film covering a surface of the lower electrode; and an upper electrode covering the dielectric film. The lower electrode includes a first conductive pattern having a groove region defined by a bottom portion and a sidewall portion; and a first core support pattern disposed in the groove region of the first conductive pattern and exposing a portion of inner sidewall of the first conductive pattern. Related methods are also provided herein.