The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
May. 24, 2010
Applicants:
Masanori Sakai, Takaoka, JP;
Tatsuyuki Saito, Toyama, JP;
Inventors:
Masanori Sakai, Takaoka, JP;
Tatsuyuki Saito, Toyama, JP;
Assignee:
Hitachi Kokusai Electric Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/443 (2006.01);
U.S. Cl.
CPC ...
Abstract
A TiN film is formed by a first step of forming a TiN intermediate film on a wafer by supplying TiCland NHreacting with TiClto the wafer and controlling a processing condition for causing a bonding branch that has not undergone a substitution reaction to remain at a predetermined concentration at a part of TiCland a second step of substituting the bonding branch contained in the TiN intermediate film by supplying Hto the wafer, the first step and the second step being performed in this order.