The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Jun. 28, 2012
Applicants:
Tomonori Minegishi, Ibaraki, JP;
Rika Nogita, Ibaraki, JP;
Dai Kawasaki, Ibaraki, JP;
Keiko Suzuki, Ibaraki, JP;
Taku Konno, Ibaraki, JP;
Inventors:
Tomonori Minegishi, Ibaraki, JP;
Rika Nogita, Ibaraki, JP;
Dai Kawasaki, Ibaraki, JP;
Keiko Suzuki, Ibaraki, JP;
Taku Konno, Ibaraki, JP;
Assignee:
Hitachi Chemical Dupont Microsystems, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G03F 7/004 (2006.01); G03F 7/26 (2006.01); G03F 7/40 (2006.01);
U.S. Cl.
CPC ...
Abstract
A photosensitive resin composition for an interlayer insulating film or a protective film of a substrate for circuit formation, which includes a polymer (a) having a structural unit shown by the formula (A) and a compound (b) which generates a radical when irradiated with active rays and has a structure shown by the following formula (B).