The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Jan. 28, 2010
Takayuki Yabu, Hiratsuka, JP;
Takeshi Asayama, Hiratsuka, JP;
Fumika Yoshida, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Takayuki Yabu, Hiratsuka, JP;
Takeshi Asayama, Hiratsuka, JP;
Fumika Yoshida, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
An extreme ultraviolet light source device in accordance with the present invention suppresses a surface that comes into contact with a target material in a molten state from being eroded by the target material, being reacted with the target material, and being cut by the target material. A target generating unitinjects molten tin in a droplet shape as a targetinto a chamber. A protective coating provided with an erosion resistance property to tin is configured on a section that comes into contact with tin in a molten state for each face of a nozzle partand a tank part. Alternatively, a part that comes into contact with tin in a molten state is made of a material provided with an erosion resistance property and a heat resistance property.