logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8604697 B1

PDFFull Text
Expired
Date of Patent:
Dec. 10, 2013

Filed:

Nov. 08, 2010

Apparatus for generating plasma

Applicant:

Hongseub Kim, Suwon-si, KR;

Inventor:

Hongseub Kim, Suwon-si, KR;

Assignee:

Jehara Corporation, Suwon-si, KR;

Attorney:

NSIP Law

Primary Examiner:

Douglas W Owens

Assistant Examiner:

Dedei K Hammond

Int. Cl.
CPC ...
H01J 7/24 (2006.01); H05B 31/26 (2006.01); C23F 1/00 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus for generating plasma is provided. The apparatus may include a vacuum chamber and a plasma source part. The plasma source part may include a dielectric part, an upper electrode, and an inductive coil. The dielectric part may be installed to protrude upward along a circumference of a through-hole provided at a top of the vacuum chamber. The upper electrode may be coupled to seal an opened top of the dielectric part. The inductive coil may spirally extend along an outer circumference surface of the dielectric part.

Find Patent Forward Citations

Kim, Hongseub. (2013). Apparatus for generating plasma (U.S. Patent No. 8604697). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8604697

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…