The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2013
Filed:
Dec. 18, 2009
Takayuki Yabu, Hiratsuka, JP;
Masaki Nakano, Yokohama, JP;
Hitoshi Nagano, Hiratsuka, JP;
Takanobu Ishihara, Hiratsuka, JP;
Takayuki Yabu, Hiratsuka, JP;
Masaki Nakano, Yokohama, JP;
Hitoshi Nagano, Hiratsuka, JP;
Takanobu Ishihara, Hiratsuka, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
A target supply apparatus controls a gas pressure inside a tank storing a liquid target material to be outputted from a nozzle by a pressure of gas supplied from a gas supply having a pressure regulator. The target supply apparatus comprises a gas passage introducing gas supplied from the gas supply into the tank, and a high-precision pressure regulator arranged on the gas passage and regulating a pressure of gas flowing the gas passage. The high-precision pressure regulator is able to regulate pressure with accuracy higher than the pressure regulator.