The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2013
Filed:
Jul. 31, 2008
Brenda L Vanmil, Alexandria, VA (US);
Kok-keong Lew, Hillsboro, OR (US);
Rachael L Myers-ward, Alexandria, VA (US);
Charles R. Eddy, Jr., Columbia, MD (US);
David Kurt Gaskill, Alexandria, VA (US);
Brenda L VanMil, Alexandria, VA (US);
Kok-Keong Lew, Hillsboro, OR (US);
Rachael L Myers-Ward, Alexandria, VA (US);
Charles R. Eddy, Jr., Columbia, MD (US);
David Kurt Gaskill, Alexandria, VA (US);
The United States of America, as represented by the Secretary of the Navy, Washington, DC (US);
Abstract
A method of: supplying sources of carbon and silicon into a chemical vapor deposition chamber; collecting exhaust gases from the chamber; performing mass spectrometry on the exhaust gases; and correlating a partial pressure of a carbon species in the exhaust gases to a carbon:silicon ratio in the chamber.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile