The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2013
Filed:
Jan. 25, 2007
Akihiko Yoneda, Toyama, JP;
Akihiko Yoneda, Toyama, JP;
Hitachi Kokusai Electric Inc., Tokyo, JP;
Abstract
A substrate processing apparatus which can securely show the status of recipe transition is provided. In a substrate processing apparatusincluding a main control unitwhich sends a control instruction to process a substrate, and a sub control unitwhich carries out control of the apparatus in accordance with the control instruction from main control unit, the main control unithas a memory unitwhich stores plural recipes, a display control unitwhich accepts an execution instruction to cause an arbitrary recipe of the plural recipes to be executed, and a display unitwhich displays the arbitrary recipe designated by the display control unit, on an operation screen. When an execution instruction to cause another recipe stored in the recipe storage means to be executed is received during the execution of the arbitrary recipe, the arbitrary recipe and this another recipe are displayed on the operation screentogether with a factor which has generated the execution instruction to cause this another recipe to be executed.