The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2013
Filed:
May. 12, 2009
Yoshiharu Umemura, Tokyo, JP;
Kensuke Kato, Tokyo, JP;
Yoshirou Nakata, Tokyo, JP;
Naomi Miyake, Osaka, JP;
Yoshiharu Umemura, Tokyo, JP;
Kensuke Kato, Tokyo, JP;
Yoshirou Nakata, Tokyo, JP;
Naomi Miyake, Osaka, JP;
Advantest Corporation, Tokyo, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A probe comprises: a membrane having a bump which contacts an input/output terminal of an IC device built into a semiconductor wafer under test; a pitch conversion board having a bottom surface on which a first terminal is provided and a top surface on which a second terminal connected to the first terminal is provided; a circuit board which is electrically connected to a test head and has a third terminal; a first anisotropic conductive rubber member having a first conductor part which electrically connects the bump of the membrane and the first terminal of the pitch conversion board; and a second anisotropic conductive rubber member having a second conductor part which electrically connects the second terminal of the pitch conversion board and the third terminal of the circuit board, and the second conductor parts are provided on the whole of the second anisotropic conductive rubber member.