The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2013
Filed:
Aug. 03, 2012
Thorbjörn Ebefors, Huddinge, SE;
Tomas Bauer, Bro, SE;
Thorbjörn Ebefors, Huddinge, SE;
Tomas Bauer, Bro, SE;
Silex Microsystems AB, Jarfalla, SE;
Abstract
A starting substrate in the form of a semiconductor wafer () has a first side and a second side, the sides being plane-parallel with respect to each other, and has a thickness rendering it suitable for processing without significant risk of being damaged, for the fabrication of combined analogue and digital designs, the wafer including at least two partitions (A, A; DIGITAL, ANALOGUE) electrically insulated from each other by insulating material (; L) extending entirely through the wafer. A method for making such substrates including etching trenches in a wafer, and filling trenches with insulating material is also described.