The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2013
Filed:
Mar. 08, 2010
Milos Toth, Portland, OR (US);
Richard J. Young, Beaverton, OR (US);
Alexander Henstra, Utrecht, NL;
Alan Frank DE Jong, Eindhoven, NL;
Johannes Jacobus Lambertus Mulders, Eindhoven, NL;
Milos Toth, Portland, OR (US);
Richard J. Young, Beaverton, OR (US);
Alexander Henstra, Utrecht, NL;
Alan Frank de Jong, Eindhoven, NL;
Johannes Jacobus Lambertus Mulders, Eindhoven, NL;
FEI Company, Hillsboro, OR (US);
Abstract
Electron-beam-induced chemical reactions with precursor gases are controlled by adsorbate depletion control. Adsorbate depletion can be controlled by controlling the beam current, preferably by rapidly blanking the beam, and by cooling the substrate. The beam preferably has a low energy to reduce the interaction volume. By controlling the depletion and the interaction volume, a user has the ability to produce precise shapes.