The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2013
Filed:
Jun. 03, 2008
Richard Fovell, San Jose, CA (US);
Paul Brillhart, Pleasanton, CA (US);
Sang IN Yi, Sunnyvale, CA (US);
Anisul H. Khan, Santa Clara, CA (US);
Jivko Dinev, Santa Clara, CA (US);
Shane Nevil, Livermore, CA (US);
Richard Fovell, San Jose, CA (US);
Paul Brillhart, Pleasanton, CA (US);
Sang In Yi, Sunnyvale, CA (US);
Anisul H. Khan, Santa Clara, CA (US);
Jivko Dinev, Santa Clara, CA (US);
Shane Nevil, Livermore, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatus for controlling the temperature of a substrate support may include a first heat transfer loop and a second heat transfer loop. The first heat transfer loop may have a first bath with a first heat transfer fluid at a first temperature. The second heat transfer loop may have a second bath with a second heat transfer fluid at a second temperature. The first and second temperatures may be the same or different. First and second flow controllers may be provided for respectively providing the first and second heat transfer fluids to a substrate support. One or more return lines may couple one or more outlets of the substrate support to the first and second baths for returning the first and second heat transfer fluids to the first and second baths.