The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Sep. 10, 2012
Ehud Aharoni, Kfar Saba, IL;
Robert J. Baseman, Brewster, NY (US);
Ramona Kei, Hopewell Junction, NY (US);
Oded Margalit, Ramat Gan, IL;
Kevin Mackey, Wappingers Falls, NY (US);
Michal Rosen-zvi, Jerusalem, IL;
Raminderpal Singh, Essex Junction, VT (US);
Noam Slonim, Jerusalem, IL;
Hong Lin, Yorktown Heights, NY (US);
Fateh A. Tipu, Wappingers Fall, NY (US);
Adam D. Ticknor, Poughkeepsie, NY (US);
Timothy M. Mccormack, Pleasant Valley, NY (US);
Ehud Aharoni, Kfar Saba, IL;
Robert J. Baseman, Brewster, NY (US);
Ramona Kei, Hopewell Junction, NY (US);
Oded Margalit, Ramat Gan, IL;
Kevin Mackey, Wappingers Falls, NY (US);
Michal Rosen-Zvi, Jerusalem, IL;
Raminderpal Singh, Essex Junction, VT (US);
Noam Slonim, Jerusalem, IL;
Hong Lin, Yorktown Heights, NY (US);
Fateh A. Tipu, Wappingers Fall, NY (US);
Adam D. Ticknor, Poughkeepsie, NY (US);
Timothy M. McCormack, Pleasant Valley, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.