The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Jun. 28, 2007
Chiu-ming Chou, Kao-suing, TW;
Jin-yuan Lee, Hsin-Chu, TW;
Chiu-Ming Chou, Kao-suing, TW;
Jin-Yuan Lee, Hsin-Chu, TW;
Megit Acquisition Corp., San Diego, CA (US);
Abstract
A method for fabricating an integrated circuit (IC) chip includes providing a passivation layer over a circuit structure, an opening in the passivation layer exposing a pad of the circuit structure, next forming a first titanium-containing layer over the pad exposed by the opening, next performing an annealing process by heating the titanium-containing layer at a temperature of between 300 and 410° C. for a time of between 20 and 150 minutes in a nitrogen ambient with a nitrogen purity of great than 99%, next forming a second titanium-containing layer on the first titanium-containing layer, and then forming a metal layer on the second titanium-containing layer.