The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Jul. 10, 2008
Guy Ben-zvi, Doar Na Misgav, IL;
Eitan Zait, Kiriat Tivon, IL;
Vladimir J. Dmitriev, Karmiel, IL;
Steven M. Labovitz, Sunnyvale, CA (US);
Erez Graitzer, Doar Na Misgav, IL;
Ofir Sharoni, Shimshit, IL;
Guy Ben-Zvi, Doar Na Misgav, IL;
Eitan Zait, Kiriat Tivon, IL;
Vladimir J. Dmitriev, Karmiel, IL;
Steven M. Labovitz, Sunnyvale, CA (US);
Erez Graitzer, Doar Na Misgav, IL;
Ofir Sharoni, Shimshit, IL;
Carl Zeiss SMS Ltd., Karmiel, IL;
Abstract
Apparatus and method for transmittance mapping of an object which is at least partially transparent to deep ultraviolet radiation. The method comprises directing a wide-band deep ultraviolet radiation so as to illuminate different areas of an array of successive areas of the object; using an optical detector positioned on an opposite side of the object with respect to the radiation source detecting the wide-band deep ultraviolet radiation that emerges from the object; and processing signals from the optical detector to determine the transmittance of the radiation through the different areas of the array of successive areas of the object.