The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Nov. 19, 2010
Xinjian Lei, Vista, CA (US);
John Anthony Thomas Norman, Encinitas, CA (US);
Daniel P. Spence, Carlsbad, CA (US);
Xinjian Lei, Vista, CA (US);
John Anthony Thomas Norman, Encinitas, CA (US);
Daniel P. Spence, Carlsbad, CA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
The present invention is related to a family of liquid group 4 precursors represented by the formula: (pyr*)M(OR)(OR)(OR) wherein pyr* is an alkyl substituted pyrrolyl, wherein M is group 4 metals include Ti, Zr, and Hf; wherein Rcan be same or different and selected from group consisting of linear or branched Calkyls; preferably Calkyls; Ris selected from the group consisting of Calkyls, preferably branched Calkyls substituted at 2, 5 positions to prevent the pyrrolyl coordinated to the metal center in ηfashion; n=2, 3, 4. Most preferably the invention is directed to (2,5-di-tert-butylpyrrolyl)(tris(ethoxy)titanium, (2,5-di-tert-amylpyrrolyl)(tris(ethoxy)titanium, and (2,5-di-tert-amylpyrrolyl)(tris(iso-propoxy)titanium. The invention is also directed to (cyclopentadienyl)(2,5-di-methylpyrrolyl)(bis(ethoxy))titanium. Deposition methods using these compounds are also contemplated.