The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
May. 16, 2008
Kanji Yasui, Nagaoka, JP;
Hiroshi Nishiyama, Nagaoka, JP;
Masatoshi Tsukichi, Chiba, JP;
Yasunobu Inoue, Nagaoka, JP;
Masasuke Takata, Nagaoka, JP;
Kanji Yasui, Nagaoka, JP;
Hiroshi Nishiyama, Nagaoka, JP;
Masatoshi Tsukichi, Chiba, JP;
Yasunobu Inoue, Nagaoka, JP;
Masasuke Takata, Nagaoka, JP;
National University Corporation Nagaoka University of Technology, Niigata, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A fabrication method for fabricating a metal oxide film introduces Hgas and Ogas or, HOgas, into a catalytic reactor to make contact with a catalyst to generate HO gas. The HO gas that is generated is jetted from the catalytic reactor to react with a metal compound gas, to thereby deposit the metal oxide thin film on a substrate and fabricate the metal oxide thin film.