The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Aug. 24, 2006
Applicants:
Christian Hennig, Berlin, DE;
Markus Weyers, Wildau, DE;
Eberhard Richter, Berlin, DE;
Guenther Traenkle, Berlin, DE;
Inventors:
Christian Hennig, Berlin, DE;
Markus Weyers, Wildau, DE;
Eberhard Richter, Berlin, DE;
Guenther Traenkle, Berlin, DE;
Assignee:
Freiberger Compound Materials GmbH, Freiberg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 25/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to a free-standing semiconductor substrate as well as a process and a mask layer for the manufacture of a free-standing semiconductor substrate, wherein the material for forming the mask layer consists at least partially of tungsten silicide nitride or tungsten silicide and wherein the semiconductor substrate self-separates from the starting substrate without further process steps.