The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
May. 04, 2011
Johannes Antonius Gerardus Akkermans, Eindhoven, NL;
Theodorus Petrus Maria Cadee, Vlierden, NL;
George Wilhelmus Johannes Clijsen, Veldhoven, NL;
Johannes Antonius Gerardus Akkermans, Eindhoven, NL;
Theodorus Petrus Maria Cadee, Vlierden, NL;
George Wilhelmus Johannes Clijsen, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A stage apparatus to position an object, the stage apparatus including a table configured to hold the object, a support structure configured to support the table, the table being displaceable relative to the support structure, the support structure including one of a first data clock and a second data clock and the table including the other one of the first data clock and the second data clock; and a circuit configured to synchronize the first and second data clocks, the circuit including a transmitter and receiver, the transmitter configured to wirelessly transmit clock signal data from the first data clock to the second data clock, and a synchronization circuit configured to synchronize the second data clock with the first data clock from the wirelessly transmitted clock signal data received by the receiver.