The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8587025 B1

PDF
Full Text
Expired
Date of Patent:
Nov. 19, 2013

Filed:

Jul. 03, 2012
Applicants:

Hans-joachim Schulze, Taufkirchen, DE;

Franz-josef Niedernostheide, Muenster, DE;

Yvonne Gawlina, Pullach im Isartal, DE;

Inventors:

Hans-Joachim Schulze, Taufkirchen, DE;

Franz-Josef Niedernostheide, Muenster, DE;

Yvonne Gawlina, Pullach im Isartal, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for forming a laterally varying n-type doping concentration is provided. The method includes providing a semiconductor wafer with a first surface, a second surface arranged opposite to the first surface and a first n-type semiconductor layer having a first maximum doping concentration, implanting protons of a first maximum energy into the first n-type semiconductor layer, and locally treating the second surface with a masked hydrogen plasma. Further, a semiconductor device is provided.


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Schulze, Hans-Joachim. (2013). Method for forming laterally varying doping concentrations and a semiconductor device (U.S. Patent No. 8587025). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8587025

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