The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2013

Filed:

Aug. 25, 2010
Applicants:

Luke D. Lacroix, Williston, VT (US);

Janak G. Patel, South Burlington, VT (US);

Peter Slota, Jr., Vestal, NY (US);

David B. Stone, Jericho, VT (US);

Inventors:

Luke D. LaCroix, Williston, VT (US);

Janak G. Patel, South Burlington, VT (US);

Peter Slota, Jr., Vestal, NY (US);

David B. Stone, Jericho, VT (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01); G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor test device including a plurality of conductive layers, each of the layers comprising integrated circuit devices, a plurality of insulating layers between the conductive layers, a plurality of heat generating structures positioned between the insulating layers and the conductive layers, each of the heat generating structures being sized and positioned to only heat a predetermined limited area of the plurality of layers, a plurality of thermal monitors positioned within each of the plurality of layers, a control unit operatively connected to the heat generating structures and the thermal monitors, the control unit individually cycling the heat generating structures on and off for multiple heat cycles, such that different areas of the layers are treated to different heat cycles.


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