The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
Apr. 11, 2012
Applicants:
Mohammad M. Farahani, Chandler, AZ (US);
Vladimir Noveski, Chandler, AZ (US);
Neha M. Patel, Chandler, AZ (US);
Nachiket R. Raravikar, Chandler, AZ (US);
Inventors:
Mohammad M. Farahani, Chandler, AZ (US);
Vladimir Noveski, Chandler, AZ (US);
Neha M. Patel, Chandler, AZ (US);
Nachiket R. Raravikar, Chandler, AZ (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A stress sensor is disclosed herein. The stress sensor includes a plurality of carbon nanotubes in a substrate, and first and second contacts electrically connectable with the plurality of carbon nanotubes. Methods of making and using the stress sensor are also disclosed.