The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2013
Filed:
Jul. 23, 2008
Michael Binnard, Belmont, CA (US);
Wen-hou MA, Los Altos, CA (US);
Toshio Ueta, Kumagaya, JP;
Pai-hsueh Yang, Palo Alto, CA (US);
Ting-chien Teng, Fremont, CA (US);
Bausan Yuan, San Jose, CA (US);
Michael Binnard, Belmont, CA (US);
Wen-Hou Ma, Los Altos, CA (US);
Toshio Ueta, Kumagaya, JP;
Pai-Hsueh Yang, Palo Alto, CA (US);
Ting-Chien Teng, Fremont, CA (US);
Bausan Yuan, San Jose, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A stage assembly () that moves a work piece () about a first axis and along a first axis includes a first stage (), a second stage () that retains the work piece (), a second mover assembly (), a measurement system, and an initialization system (A). The second mover assembly () moves the second stage () relative to the first stage () about the first axis. The measurement system () monitors the position of the second stage () about the first axis when the second stage () is positioned within a working range about the first axis. The initialization system (A) facilitates movement of the second stage () about the first axis when the second stage () is rotated about the first axis outside the working range. The second mover assembly () can include a mover () and a dampener () that reduces the transmission of vibration from the first stage () to the second stage (). In addition, the stage assembly () can include a control system () that directs power to the mover () to position the second stage () and to compensate for vibration of the first stage ().