The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2013

Filed:

May. 14, 2010
Applicants:

Hiroyasu Kaga, Mito, JP;

Kanehiro Nagao, Hitachinaka, JP;

Motohide Ukiana, Hitachinaka, JP;

Inventors:

Hiroyasu Kaga, Mito, JP;

Kanehiro Nagao, Hitachinaka, JP;

Motohide Ukiana, Hitachinaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 27/02 (2006.01); G01N 23/00 (2006.01); G21G 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A liquid metal ion gunincludes a liquid metal ion sourceand a beam limiting aperture. The liquid metal ion sourceincludes a reservoirand an emitter. The reservoiris made of tungsten (W) and holds liquid metal gallium (Ga). The emitteris made of W. The beam limiting apertureis formed with a liquid metal membermade of Ga placed on a basemade of W, has an openingthat enables an ion beamextracted from the liquid metal ion sourceto pass therethrough, and limits the diameter of the ion beam. The beam limiting aperturehas a groove structurethat causes the liquid metalto gather into a region located around the opening. The lifetime of the beam limiting aperture can be increased, and an emission can be maintained stable for a long time period and reproducibly restored to a stable state.


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