The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2013
Filed:
Oct. 26, 2007
Yasuharu Sasaki, Nirasaki, JP;
Takehiro Ueda, Nirasaki, JP;
Taketoshi Okajo, Nirasaki, JP;
Kaoru Oohashi, Miyagi-gun, JP;
Yasuharu Sasaki, Nirasaki, JP;
Takehiro Ueda, Nirasaki, JP;
Taketoshi Okajo, Nirasaki, JP;
Kaoru Oohashi, Miyagi-gun, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An apparatus evaluates a substrate mounting device adapted to hold a target substrate placed on a mounting surface and to control a temperature of the target substrate. The apparatus includes an evacuatable airtightly sealed chamber accommodating therein the substrate mounting device, a heat source, arranged in a facing relationship with the mounting surface, for irradiating infrared light. The apparatus further includes an evaluation-purpose substrate adapted to be mounted on the mounting surface in place of the target substrate, the evaluation-purpose substrate being made of an infrared light absorbing material, and having a unit for measuring temperatures at plural sites on a surface and/or inside of the substrate.