The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Jan. 28, 2010
Katsuhiro Miura, Mitaka, JP;
Hajime Hirose, Fuchu, JP;
Hideo Kotajima, Fuchu, JP;
Takao Tsukamoto, Chofu, JP;
Minoru Ishima, Kawasaki, JP;
Katsuhiro Miura, Mitaka, JP;
Hajime Hirose, Fuchu, JP;
Hideo Kotajima, Fuchu, JP;
Takao Tsukamoto, Chofu, JP;
Minoru Ishima, Kawasaki, JP;
Mitaka Kohki Co., Ltd., Tokyo, JP;
Abstract
Even if a return beam from a work to be measured does not agree with the center of a two-piece sensor, a correction value is calculated according to a voltage difference between two sensors of the two-piece sensor if the voltage difference is within a neighborhood range. The correction value is added to an actual position of an objective lens in an up-down direction, to calculate a movement amount of the objective lens up to a focused state (a state in which the return beam agrees with the center of the two-piece sensor).