The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2013

Filed:

Jul. 11, 2011
Applicants:

Xiaodong Han, Beijing, CN;

Yonghai Yue, Beijing, CN;

Yuefei Zhang, Beijing, CN;

Pan Liu, Beijing, CN;

Kun Zheng, Beijing, CN;

Xiaodong Wang, Beijing, CN;

Ze Zhang, Beijing, CN;

Inventors:

Xiaodong Han, Beijing, CN;

Yonghai Yue, Beijing, CN;

Yuefei Zhang, Beijing, CN;

Pan Liu, Beijing, CN;

Kun Zheng, Beijing, CN;

Xiaodong Wang, Beijing, CN;

Ze Zhang, Beijing, CN;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 1/28 (2006.01); H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

A double tilt sample holder for in-situ measuring mechanical and electrical properties of microstructures in transmission electron microscope (TEM) is provided. The sample holder includes a home-made hollow sample holder body, a sensor for measuring mechanical/electrical properties, a pressing piece, a sample holder head, a sensor carrier. The sensor for measuring mechanical/electrical properties is fixed on the sensor carrier on the sample holder head by the pressing piece, while the sensor carrier is connected to the sample holder head through a pair of supporting shafts located on sides of the sample holder head. The sensor carrier can tilt within the plane perpendicular to the ample holder head by revolving around the supporting shafts (i.e. tilting along Y axis at an angle of ±30°). The sample holder also allows obtaining mechanical/electrical parameters concurrently.


Find Patent Forward Citations

Loading…