The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Oct. 07, 2011
Guido Martinus Henricus Knippels, Schijndel, NL;
Fredericus Bernardus Kiewiet, Eindhoven, NL;
Hendrik Nicolaas Slingerland, Venlo, NL;
Pieter Kruit, Delft, NL;
Benjamin John Cook, The Hague, NL;
Jacques Nonhebel, Delft, NL;
Guido Martinus Henricus Knippels, Schijndel, NL;
Fredericus Bernardus Kiewiet, Eindhoven, NL;
Hendrik Nicolaas Slingerland, Venlo, NL;
Pieter Kruit, Delft, NL;
Benjamin John Cook, The Hague, NL;
Jacques Nonhebel, Delft, NL;
FEI Company, Hillsboro, OR (US);
Abstract
The invention relates to an electrostatic beam blanker for a particle-optical apparatus, in which the blanker is used to generate a train of pulses with a fixed repetition rate. Such pulse trains with a sub-picosecond pulse length are for example used in the study of chemistry in the femtosecond scale. The beam blanker according to the invention uses a resonant structure, as a result of which the voltage is amplified by the quality factor Q of the resonant structure. During each zero-crossing of the signal, thus twice per period of the resonant frequency, the beam is transmitted, and the beam is blanked during the rest of the time. In a preferred embodiment the resonant structure comprises a transmission line. Impedance matching of signal source and resonant structure may be performed by tuning stubs.