The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Jun. 08, 2006
Applicants:
Peter Nicholas Heys, Crewe, GB;
Paul Williams, Wirral, GB;
Fuquan Song, Eastham, GB;
Inventors:
Assignee:
Sigma-Aldrich Co. LLC, St. Louis, MO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Precursors suitable for chemical vapor deposition, especially ALD, of hafnium oxide or zirconium oxide, have the general formula:(RCp)MRwherein Cp represents a cyclopentadienyl ligand, Ris H or a substituting alkyl group, alkoxy group or amido group of the Cp ligand, Ris an alkyl group, an alkoxy group or an amido group and M is hafnium or zirconium.