The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2013
Filed:
Aug. 27, 2012
Hiroyasu Shichi, Tokyo, JP;
Shinichi Matsubara, Chofu, JP;
Norihide Saho, Tsuchiura, JP;
Noriaki Arai, Hitachinaka, JP;
Tohru Ishitani, Sayama, JP;
Hiroyasu Shichi, Tokyo, JP;
Shinichi Matsubara, Chofu, JP;
Norihide Saho, Tsuchiura, JP;
Noriaki Arai, Hitachinaka, JP;
Tohru Ishitani, Sayama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip () for generating ions; an emitter base mount () for supporting the emitter tip; an ionizing chamber which has an extraction electrode () opposed to the emitter tip and which is configured so as to surround the emitter tip (); and a gas supply tube () for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.