The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2013
Filed:
Aug. 04, 2011
Shambhu N. Roy, Sunnyvale, CA (US);
Martin Lee Riker, Milpitas, CA (US);
Keith A. Miller, Mountain View, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Steven V. Sansoni, Livermore, CA (US);
Shambhu N. Roy, Sunnyvale, CA (US);
Martin Lee Riker, Milpitas, CA (US);
Keith A. Miller, Mountain View, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Steven V. Sansoni, Livermore, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An electrostatic chuck and method of use thereof is provided herein. In some embodiments, an electrostatic chuck may include a disk having a first side to support a substrate thereon and a second side, opposing the first side, to provide an interface to selectively couple the disk to a thermal control plate, a first electrode disposed within the disk proximate the first side to electrostatically couple the substrate to the disk and a second electrode disposed within the disk proximate the opposing side of the disk to electrostatically couple the disk to the thermal control plate. In some embodiments, the second electrode may also be configured to heat the disk.