The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Dec. 29, 2010
Yong-tong Zou, Taoyuan County, TW;
Ding-kun Liu, Hsinchu County, TW;
Hau-wei Wang, Taipei, TW;
Chih-hsiang Chan, Taipei County, TW;
Yong-Tong Zou, Taoyuan County, TW;
Ding-Kun Liu, Hsinchu County, TW;
Hau-Wei Wang, Taipei, TW;
Chih-Hsiang Chan, Taipei County, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
An embodiment of the invention provides an apparatus for measuring a conductive pattern on a substrate, which includes a first electro-optical modulator surrounding at least one first detecting roller; transmission rollers for transferring the substrate and allowing direct contact of the substrate and the first electro-optical modulator; a voltage supplier for providing a bias between the first electro-optical modulator and the substrate; and a first image detecting system for receiving a first detecting light reflected from a first surface of the substrate.