The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Nov. 29, 2012
Daehong Eom, Hwaseong-si, KR;
Kyunghyun Kim, Seoul, KR;
Kwangsu Kim, Seoul, KR;
Jun-youl Yang, Seoul, KR;
Se-ho Cha, Goyang-si, KR;
Daehong Eom, Hwaseong-si, KR;
Kyunghyun Kim, Seoul, KR;
Kwangsu Kim, Seoul, KR;
Jun-Youl Yang, Seoul, KR;
Se-Ho Cha, Goyang-si, KR;
Abstract
A mold stack including alternating insulation layers and sacrificial layers is formed on a substrate. Vertical channel regions extending through the insulation layers and sacrificial layers of the mold stack are formed. Gate electrodes are formed between adjacent ones of the insulation layers and surrounding the vertical channel regions. The gate electrodes have a greater thickness at a first location near sidewalls of the insulation layers than at a second location further away from the sidewalls of the insulation layers.