The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Oct. 30, 2009
Applicants:
Huirong Yao, Plainsboro, NJ (US);
Guanyang Lin, Whitehouse Station, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
Inventors:
Huirong Yao, Plainsboro, NJ (US);
Guanyang Lin, Whitehouse Station, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
Assignee:
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); G03F 7/38 (2006.01); G03F 7/40 (2006.01); C09D 167/00 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to an antireflective coating composition for a photoresist layer comprising a polymer, a crosslinking agent and an acid generator, where the polymer comprises at least one unit of structure 1,